JPH0521865Y2 - - Google Patents
Info
- Publication number
- JPH0521865Y2 JPH0521865Y2 JP4598687U JP4598687U JPH0521865Y2 JP H0521865 Y2 JPH0521865 Y2 JP H0521865Y2 JP 4598687 U JP4598687 U JP 4598687U JP 4598687 U JP4598687 U JP 4598687U JP H0521865 Y2 JPH0521865 Y2 JP H0521865Y2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- tube
- transfer table
- sealed chamber
- workpiece transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 239000004744 fabric Substances 0.000 claims description 3
- 239000011888 foil Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4598687U JPH0521865Y2 (en]) | 1987-03-28 | 1987-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4598687U JPH0521865Y2 (en]) | 1987-03-28 | 1987-03-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63153519U JPS63153519U (en]) | 1988-10-07 |
| JPH0521865Y2 true JPH0521865Y2 (en]) | 1993-06-04 |
Family
ID=30865231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4598687U Expired - Lifetime JPH0521865Y2 (en]) | 1987-03-28 | 1987-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521865Y2 (en]) |
-
1987
- 1987-03-28 JP JP4598687U patent/JPH0521865Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63153519U (en]) | 1988-10-07 |
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